Design of Σ-Δ High-Pass Cascade Modulator for MEMS Gyroscope

WANG Pei-sheng; QUAN Hai-yang; ZHANG Fu-qiang; HU Zhi-yong

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Design of Σ-Δ High-Pass Cascade Modulator for MEMS Gyroscope

更新时间：2026-09-04

- Design of Σ-Δ High-Pass Cascade Modulator for MEMS Gyroscope
- Vol. 27, Issue 12, Pages: 47-50(2010)
- 作者机构：
  
  北京微电子技术研究所机构,北京,100074
- 作者简介：
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- DOI：
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- Published：2010
- 稿件说明：
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王佩生, 权海洋, 张富强, 胡智勇. 应用于MEMS陀螺中的Σ-Δ高通级联型调制器设计[J]. 微电子学与计算机, 2010, 27(12): 47-50,54.

WANG Pei-sheng, QUAN Hai-yang, ZHANG Fu-qiang, et al. Design of Σ-Δ High-Pass Cascade Modulator for MEMS Gyroscope[J]. 2010, 27(12): 47-50.
王佩生, 权海洋, 张富强, 胡智勇. 应用于MEMS陀螺中的Σ-Δ高通级联型调制器设计[J]. 微电子学与计算机, 2010, 27(12): 47-50,54. DOI：

WANG Pei-sheng, QUAN Hai-yang, ZHANG Fu-qiang, et al. Design of Σ-Δ High-Pass Cascade Modulator for MEMS Gyroscope[J]. 2010, 27(12): 47-50. DOI：

摘要

研究并设计了一种应用于MEMS陀螺的Σ-Δ高通级联型调制器.该调制器基于0.35μm 3.3 V的现代CMOS工艺

选取了无条件稳定的1-1-1 MASH (Multi-stage noise Shaping

多级噪声整形) 结构

采用了斩波稳零技术

消除运放1/f噪声和直流偏移.高通积分器的运用

优化了低频信号的传输抗干扰性.本设计中的调制器能够转换MEMS陀螺中带宽40 kHz

范围几十至几百毫伏的目标信号

电路采样时钟频率10.24 MHz

调制器动态范围超过100 dB

有效位数达到17位.

Abstract

This paper presents a novel High-Pass cascade Σ-Δ modulator for MEMS gyroscope.The work is fabricated in a 0.35 μm CMOS technology with 3.3 V supply voltage.The structure is unconditional stable based on 1-1-1 Multi-stage noise Shaping (MASH) .Chopper stabilization method is used for eliminating 1/f noise and DC offset of the OTA.The use of High-Pass integrator has optimized the transmission of low frequency signal without disturbance.This modulator is capable of handling signals with 40 kHz bandwidth and amplitudes ranging from microvolts to hundreds of millivolts in MEMS gyroscope.The sampling rate is 10.24 MSamples/sec.Dynamic rang of the modulator is over 100 dB with a resolution of 17 bit.

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