Design of a 600 V VDMOS Termination Structure

HU Yu-song; FENG Quan-yuan; CHEN Xiao-pei

Chinese

您当前的位置：

首页 >

文章列表页 >

Design of a 600 V VDMOS Termination Structure

更新时间：2026-09-04

- Design of a 600 V VDMOS Termination Structure
- Vol. 31, Issue 6, Pages: 129-132(2014)
- 作者机构：
  
  西南交通大学微电子研究所,四川,成都,610031
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：2014
- 稿件说明：
移动端阅览
胡玉松, 冯全源, 陈晓培. 一款600V VDMOS终端结构的设计[J]. 微电子学与计算机, 2014, 31(6): 129-132.

HU Yu-song, FENG Quan-yuan, CHEN Xiao-pei. Design of a 600 V VDMOS Termination Structure[J]. 2014, 31(6): 129-132.
胡玉松, 冯全源, 陈晓培. 一款600V VDMOS终端结构的设计[J]. 微电子学与计算机, 2014, 31(6): 129-132. DOI：

HU Yu-song, FENG Quan-yuan, CHEN Xiao-pei. Design of a 600 V VDMOS Termination Structure[J]. 2014, 31(6): 129-132. DOI：

摘要

设计了一款600 V VDMOS功率器件的终端保护环结构，采用场限环与复合场板相结合的方式降低硅表面的电场峰值，且表面电场分布均匀.在159 μm终端长度上仿真实现了670 V的耐压，表面电场最大值为2.36e5 V*cm，提高了终端的可靠性；工艺简单，同时没有增加额外的掩膜与步骤.

Abstract

The termination structure of 600 V VDMOS has been designed

which consists of the field limit ring and the complex filed plate to reduce the peak of the electric field and make it flat at the silicon surface. By the simulation

the breakdown-voltage 670 V has been achieved with 159 μm length termination structure

and the terminations reliability has been improved owing to 2.36e5 V*cm of the maximum surface electric-field. The process technology of this device is simple without additional masks and steps.

关键词

Keywords

references

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Implementation and verification of a dual-chain power gating strategy for low power design

Monte carlo analysis of V-layout trench SiC neutron detector

A feature-oriented context understanding and slice analysis network for tuberculosis detection

Microservices anomaly detection based on the correlation of monitoring metrics

Design of ultra-low power real-time clock circuits

Related Author

No data

Related Institution

No data

AI问答

Postal code：100079
Tel：（010）53879206 Email：tmw@bjxintong.com.cn
Technical support is provided by Beijing Founder electronics co., LTD 京ICP备09082226号-64 京公网安备11010602201714号
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰