In order to overcome the traditional power MOSFET contradiction between on-state resistance and breakdown voltage
the super junction (SJ) device is introduced
so that it improves the breakdown voltage through the transverse electric field. In asymmetric pillar design requirements
establishing the asymmetry analysis model
introducing asymmetric factor k
analyzing the physical meaning of k and modifying the k value for pillar in different proportions
analytical expression of super junction is derived. In order to verify the accuracy of the design
basing on trench gate SJ-MOS device
simulation verification and comparison are carried out.
theoretical and simulation results are in good agreement
the theory can be used as a guide for the design of super junction MOSFET.
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references
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