HUANG Yun-bo, LI Bo, YANG Ling, et al. Three-dimensional TCAD Simulation Study of the Total Ionizing Dose Effect on Bulk nFinFET[J]. 2018, 35(8): 42-47.
HUANG Yun-bo, LI Bo, YANG Ling, et al. Three-dimensional TCAD Simulation Study of the Total Ionizing Dose Effect on Bulk nFinFET[J]. 2018, 35(8): 42-47.DOI:
Three-dimensional TCAD Simulation Study of the Total Ionizing Dose Effect on Bulk nFinFET
Using Technology Computer Aided Design (TCAD) simulation
the total ionizing dose(TID)effect of bulk fin field-effect transistor(FinFET) is investigated in detail. Based on well calibrated device model generated
it is shown that FinFETs with high channel stop doping concentration
large fin width and tapered fin cross-section shape exhibit great TID immunity. Further gamma radiation simulation illustrates the evolution of trapped holes in shallow trench isolation (STI) oxide. In addition
circuit level response of TID effect is analyzed using Sentaurus mixed-mode simulation method. It is demonstrated that the performance and stability suffer adverse degeneration during TID.
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references
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