Design of a high accuracy CMOS temperature sensor

CHEN Gui-bao; GUO Zhong-jie; LI Ting; WEI Hai-long

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Design of a high accuracy CMOS temperature sensor

更新时间：2026-09-04

- Design of a high accuracy CMOS temperature sensor
- Vol. 36, Issue 8, Pages: 34-38(2019)
- 作者机构：
  
  1. 西安微电子技术研究所,陕西,西安,710054
  2. 西安理工大学机构自动化与信息工程学院,陕西,西安,710048
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：2019
- 稿件说明：
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陈贵宝, 郭仲杰, 李婷, 魏海龙. 一种高精度CMOS温度传感器的设计[J]. 微电子学与计算机, 2019, 36(8): 34-38, 44.

CHEN Gui-bao, GUO Zhong-jie, LI Ting, et al. Design of a high accuracy CMOS temperature sensor[J]. 2019, 36(8): 34-38.
陈贵宝, 郭仲杰, 李婷, 魏海龙. 一种高精度CMOS温度传感器的设计[J]. 微电子学与计算机, 2019, 36(8): 34-38, 44. DOI：

CHEN Gui-bao, GUO Zhong-jie, LI Ting, et al. Design of a high accuracy CMOS temperature sensor[J]. 2019, 36(8): 34-38. DOI：

摘要

基于标准CMOS工艺

提出了一种高精度低功耗的温度传感器.通过采用高精度比例电流生成模块、纵向寄生的NPN型双极晶体管以及改进的输出端结构等措施

抑制了电路噪声、提高了温度到电压的转换精度.基于55 nm CMOS工艺

采用Spectre工具对电路进行仿真

结果表明:该温度传感器在-55℃~85℃内灵敏度为3.84 mV/℃

仿真精度为0.17℃

电路功耗为130 μA.经过后端物理实现后

版图面积为325 μm×64 μm.采用STAR_RCXT对该电路提参后仿

得到后仿真精度为0.14℃/-0.24℃.

Abstract

Based on standard CMOS process

a high accuracy and low power temperature sensor is proposed. By adopting high precision proportional current generation modules

vertical parasitic NPN bipolar transistors and improving output end structure

the noise of the circuit is suppressed and the temperature to voltage conversion accuracy is improved. Based on 55nm CMOS process

the circuit has been simulated with Spectre tool. The simulation results show that the sensitivity of the temperature sensor is 3.84 mV/℃ and the inaccuracy is 0.17℃ as the temperature differs from -55℃ to 85℃. The whole circuit dissipates 130μA. After the back-end physical implementation

the layout of the temperature sensor occupies an area of 325μm×64μm. Using STAR_RCXT to extract parasitic parameters from the layout and conduct post-simulation

the result indicates that the inaccuracy is 0.14℃/-0.24℃.

关键词

Keywords

references

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ZHAO C, WANG Y T, GENZER D, et al. A CMOS On-Chip Temperature Sensor with -0.21℃/0.17℃ Inaccuracy from -20℃ to 100℃[C]//International Symposium on Circuit and System. IEEE, 2013: 2621-2615.

梁勇勤, 高精度低功耗CMOS温度传感器的设计[D].西安: 西安电子科技大学, 2013.

秦瑞, 沈延钊, 王纪民.一种CMOS智能温度传感器前端电路的设计[J].微电子学, 2007, 37(2):286-290. DOI: 286

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