A two-step approximation capacitance-voltage circuit design for gyroscope application

CHEN Chengying; WANG Yue; GAO Daifa; YING Jiayu; WANG Xiaoquan

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A two-step approximation capacitance-voltage circuit design for gyroscope application

更新时间：2026-09-04

- A two-step approximation capacitance-voltage circuit design for gyroscope application
- Vol. 38, Issue 9, Pages: 99-104(2021)
- 作者机构：
  
  厦门理工学院机构光电与通信工程学院,福建,厦门,361024
- 作者简介：
- 基金信息：
- DOI：
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- Published：2021
- 稿件说明：
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陈铖颖, 王悦, 高代法, 尹家宇, 王晓荃. 面向陀螺仪应用的两步逼近电容-电压转换电路[J]. 微电子学与计算机, 2021, 38(9): 99-104.

CHEN Chengying, WANG Yue, GAO Daifa, et al. A two-step approximation capacitance-voltage circuit design for gyroscope application[J]. 2021, 38(9): 99-104.
陈铖颖, 王悦, 高代法, 尹家宇, 王晓荃. 面向陀螺仪应用的两步逼近电容-电压转换电路[J]. 微电子学与计算机, 2021, 38(9): 99-104. DOI：

CHEN Chengying, WANG Yue, GAO Daifa, et al. A two-step approximation capacitance-voltage circuit design for gyroscope application[J]. 2021, 38(9): 99-104. DOI：

摘要

设计了一款面向MEMS陀螺仪检测应用的两级电容-电压转换电路.电路采用输入共模反馈技术，降低了寄生电容和增益电容引起的输入共模电压漂移；同时结合相关双采样、补偿电容与保持电容技术，实现了两步逼近的电压输出，降低了增益误差，提高了输出信号频率和精度.电路采用SMIC 0.18 m 1P6M工艺进行实现.后仿真结果表明：电源电压3.3 V，在500 kHz采样时钟频率下，最大处理信号频率20 kHz，电容-电压灵敏度为12.4 mV/fF；在100 Hz带宽内输出信号动态范围为62.3 dB，平均功耗3.85 mW。

Abstract

For Micro Electro Mechanical Systems (MEMS) gyroscope detection application

a two-stage capacitance-voltage (CV) circuit is presented. The input common-mode feedback technology is used to reduce the input common-mode voltage drift caused by parasitic and gain capacitors. Meanwhile

combined with correlated double sampling

compensation and holding capacitor technology

the two-step approximation voltage output is realized

which decrease the gain error

improves the frequency and accuracy of output signal. The circuit is fabricated by SMIC 0.18 m 1P6M CMOS process. The post-simulation results show that in 3.3 V supply voltage

with 500 kHz clock frequency

the maximum signal frequency is 20 kHz

the C-V sensitivity is 12.4 mV/fF. Within 100 Hz bandwidth the dynamic range (DR) is 62.3 dB

and average power consumption is 3.85 mW.

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references

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吴其松, 杨海钢, 张翀, 等. 一种适用于MEMS陀螺仪的高性能电容读出电路[J]. 仪器仪表学报, 2010, 31(4): 937-943. DOI: 10.19650/j.cnki.cjsi.2010.04.036. WU Q S, YANG H G, ZHANG C, et al. High-performance capacitive readout circuit for MEMS gyroscope[J]. Chinese Journal of Scientific Instrument, 2010, 31(4): 937-943. DOI: 10.19650/j.cnki.cjsi.2010.04.036.

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