In this thesis

the author comprehensively composed all-round research on the technology of surface topography measurement.The measure process includes phase-shifting

sample taking

extracting of phase

data handling.The entire measurement system used the laser as the light resource

CCD as the sensor and PZT to provide microscopic translating

the computer sampled image and processed data with high speed.Adopted the theory

the 3-D surface topography of standard specimen was carried out.Then we separated the inf...