Research of Temperature Compensation on High Accuracy Pressure Sensors
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Research of Temperature Compensation on High Accuracy Pressure Sensors
Vol. 16, Issue 6, Pages: 55-57(2011)
作者机构:
1. 盐城工学院信息工程学院
2. 东南大学信息科学与工程学院
作者简介:
基金信息:
DOI:
CLC:TP212
Published:2011
稿件说明:
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BIAN Jin-hong, WANG Ji-lin, ZHOU Feng. Research of Temperature Compensation on High Accuracy Pressure Sensors[J]. 2011, 16(6): 55-57.
DOI:
BIAN Jin-hong, WANG Ji-lin, ZHOU Feng. Research of Temperature Compensation on High Accuracy Pressure Sensors[J]. 2011, 16(6): 55-57.DOI:
Research of Temperature Compensation on High Accuracy Pressure Sensors
摘要
半导体的温度特性会使压阻式压力传感器的零点和灵敏度随温度而发生漂移
是造成压力传感器测量误差的主要因素.对于高精度压力检测系统
温度漂移已成为提高其系统性能的重要障碍
在环境温度变化较大的应用领域更是如此.在分析多种温补方法优缺点的基础上
提出了一种结合多项式曲线拟合和三次样条插值的温度补偿方法
可以较好地提高测量压力的精确度
提升压力测量系统性能.
Abstract
The temperature characteristics of semiconductor will make zero and sensitivity of pressure sensor drift with temperature.It is the main factor that causes measurement error of pressure sensor.For high precision pressure detection systems
especially in applications that temperature changes greatly
temperature drift has become a major obstacle to improve their system performance.This paper analyzes the advantages and disadvantages of a variety of temperature compensation methods