Gas-sensitive Characteristics Research of Al/CuPc/Cu Schottky Diode

WANG Dong-xing; LIU Xiao-lian; JIAO Bing-bing; LIU Yue

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Gas-sensitive Characteristics Research of Al/CuPc/Cu Schottky Diode

更新时间：2026-07-10

- Gas-sensitive Characteristics Research of Al/CuPc/Cu Schottky Diode
- Vol. 17, Issue 2, Pages: 127-130(2012)
- 作者机构：
  
  哈尔滨理工大学应用科学学院
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN311.7
- Published：2012
- 稿件说明：
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WANG Dong-xing, LIU Xiao-lian, JIAO Bing-bing, et al. Gas-sensitive Characteristics Research of Al/CuPc/Cu Schottky Diode[J]. 2012, 17(2): 127-130.
DOI：

WANG Dong-xing, LIU Xiao-lian, JIAO Bing-bing, et al. Gas-sensitive Characteristics Research of Al/CuPc/Cu Schottky Diode[J]. 2012, 17(2): 127-130. DOI：

摘要

实验采用溅射和蒸发镀膜工艺

制备了一种新型的Al/CuPc/Cu三明治结构NO2气敏传感器.这种器件对NO2气体具有较高的敏感性

制备工艺简单

成本较低.通过研究其在NO2气体中电学特性的变化

来表征其敏感特性.研究结果表明

在10 ppm的NO2气体环境中

器件的正向电流明显增大.通过比较器件在空气和NO2气体中器件的肖特基势垒高度的变化

发现通入NO2气体50分钟后

CuPc/Al势垒高度降低了60 meV

正向整流电流增加77倍.

Abstract

In this experiment

a novel NO2 gas sensor

Al/CuPc/Cu sandwich structure

was prepared by sputtering and evaporation coating techniques.This device has high sensitivity of NO2 gas

simple process and lower cost.Sensitive characteristics of the device is represented through its changes of electrical properties in the NO2 gas.The results show that the positive current of the device significantly increased in the 10 ppm NO2 gas environment.The change of Schottky barrier height is compared when the dev...

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