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Ultrafastfabricationofhigh-aspect-ratiomacroporesinP-typesilicon:towardthemassproductionofmicrodevices
更新时间：2026-08-19

    • Ultrafastfabricationofhigh-aspect-ratiomacroporesinP-typesilicon:towardthemassproductionofmicrodevices

    • Materials Research Letters   Vol. 6, Issue 11, (2018)

    • Online First：05 October 2018，

      Published：2018

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  • Ultrafastfabricationofhigh-aspect-ratiomacroporesinP-typesilicon:towardthemassproductionofmicrodevices[J]. Materials Research Letters, 2018, 6(11). DOI：

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