strain-rate sensitivity (SRS) and shear transformation zone (STZ) volume of co-sputtered Cu–Zr metallic glass films with film thickness
h
spanning from 1000 to 3000 nm were systematically investigated by nanoindentation creep tests at room temperature. Experimental results manifested an exceptional decrease in hardness and a monotonic increment in SRS (or a monotonic decline in STZ volume) with reducing
h
. The deformation mechanism could be rationalized in light of more free volume combined with smaller STZs in thinner films
which likely trigger the strain-softening behavior. Moreover
STZs and deformation-induced devitrification promote the homogeneous-like plastic flow.