BSTRACTDislocation creep behaviors of CoCrFeMnNi were investigated at intermediate temperatures. Shape of creep curves

stress exponents and the activation energies at high stresses (40 MPa) were distinctly different from those at low stresses

suggesting the transition of creep mechanism from climb-controlled creep to viscous glide creep. Lattice strain energy of dislocations plays an important role on the distribution of atoms over the configurational entropy in the vicinity of dislocation. The excellent agreement between the experimental transition stress and the theoretical stress using the data of Cr suggests that Cr is the most influential element to the viscous glide at high stresses.