Jonas Hafner, Marco Teuschel, Davide Disnan, et al. Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators[J]. Materials Research Letters, 2021, 9(4): 195-203.
DOI:
Jonas Hafner, Marco Teuschel, Davide Disnan, et al. Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators[J]. Materials Research Letters, 2021, 9(4): 195-203.DOI: 10.1080/21663831.2020.1868593.
Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators
Piezoelectricity in ferroelectrics arises from electrostriction biased by their spontaneous polarisation
which can be enhanced through a bias-induced polarisation. Doing so
the piezoelectric response can be tuned and significantly enhanced. In this study
the ferroelectric polymer P(VDF-TrFE) was used to electro-mechanically excite a silicon microcantilever. Using this device
we demonstrate that a bias-induced polarisation improves the piezoelectric response of P(VDF-TrFE). To distinguish between the linear piezoelectric and quadratic electrostrictive effect
lock-in measurements were performed in order to separate the characteristic frequency response of both electro-mechanical phenomena. This work shows the potential for MEMS devices having controllable actuating and sensing properties.