Marc Stevens, Hanna Pazniak, Alexander Jemiola, et al. Pulsed laser deposition of epitaxial Cr2AlC MAX phase thin films on MgO(111) and Al2O3(0001)[J]. Materials Research Letters, 2021, 9(8): 343-349.
DOI:
Marc Stevens, Hanna Pazniak, Alexander Jemiola, et al. Pulsed laser deposition of epitaxial Cr2AlC MAX phase thin films on MgO(111) and Al2O3(0001)[J]. Materials Research Letters, 2021, 9(8): 343-349.DOI: 10.1080/21663831.2021.1920510.
Pulsed laser deposition of epitaxial Cr2AlC MAX phase thin films on MgO(111) and Al2O3(0001)
AlC MAX phase thin films were grown on MgO(111) and Al
2
O
3
(0001) by pulsed laser deposition (PLD) at 600°C. X-ray diffraction and morphology studies of Cr
2
AlC thin films on MgO (111) reveal phase purity
columnar growth
the epitaxial relation Cr
2
AlC(0001) || MgO(111) and Cr
2
AlC [11-20
]
|| MgO[10-1
]
and similar growth behaviour on Al
2
O
3
(0001). Resistivity measurements show semiconductor-like behaviour for 10 and 20 nm thick films
and metallic-like behaviour for thicker films
suggesting a percolation thickness slightly above 20 nm. Our results demonstrate the potential of PLD as a novel method for the growth of epitaxial MAX phase thin films.
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references
Lange C. Construction of a pulsed laser deposition (PLD) system and investigations on PLD in the MAX phase systems Ti-Si-C, Cr-Al-C and Ti-Al-N [dissertation]. Göttingen: Georg-August-University at Göttingen; 2009. German. (Open in a new window)Google Scholar