Emerging low-dimensional materials for nanoelectromechanical systems resonators

Siyuan Ban; Xuchen Nie; Zhihao Lei; Jiabao Yi; Ajayan Vinu; Yang Bao; Yanpeng Liu

doi:10.1080/21663831.2022.2111233

Chinese

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Emerging low-dimensional materials for nanoelectromechanical systems resonators

Brief Overview | 更新时间：2026-08-19

- Emerging low-dimensional materials for nanoelectromechanical systems resonators
- Materials Research Letters Vol. 11, Issue 1, Pages: 21-52(2023)
- 作者机构：
  
  1. a Key Laboratory for Intelligent Nano Materials and Devices of Ministry of Education State Key Laboratory of Mechanics and Control of Mechanical Structures and Institute for Frontier Science Nanjing University of Aeronautics and Astronautics
  2. b Global Innovative Centre for Advanced Nanomaterials College of Engineering Science and Environment The University of Newcastle
  3. c State Key Laboratory of Luminescence and Applications Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Sciences
- 作者简介：
- 基金信息：
- DOI：10.1080/21663831.2022.2111233
  CLC：
- Online First：20 September 2022，
  
  Published：2023
- 稿件说明：
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Siyuan Ban, Xuchen Nie, Zhihao Lei, et al. Emerging low-dimensional materials for nanoelectromechanical systems resonators[J]. Materials Research Letters, 2023, 11(1): 21-52.
DOI：

Siyuan Ban, Xuchen Nie, Zhihao Lei, et al. Emerging low-dimensional materials for nanoelectromechanical systems resonators[J]. Materials Research Letters, 2023, 11(1): 21-52. DOI： 10.1080/21663831.2022.2111233.

摘要

Abstract

Low-dimensional materials (LDMs)

due to exotic mechanical

optical and electrical properties enhanced by ultrahigh surface-to-volume ratio and quantum confinements

have taken centerstage in nanoelectromechanical system (NEMS) resonators. The ability to survive from high strains and complex environments enables LDMs-based NEMS resonators innovative effectuations for mass-

gas- and bio-sensings and computings. In this review

we highlighted the fabrication

actuation

detection

figure of merit

influence factors and recent process of LDMs-based NEMS resonators. After overviewing representative applications and feasible directions

we summarized the confronted challenges in fabrications

tunings and utilizations of LDMs-based NEMS resonators. Finally

the prospects that may properly tackle these obstacles were concluded

attempting to offer useful guidelines for both theoretical and experimental experts to promote NEMS resonators one step closer toward industrializations.

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