Review of water assisted laser micro-machining technology

GUO Bing; LIU Wenchao; ZHAO Qingliang; SATA Habib; AMR Monier

doi:10.11918/201909081

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Review of water assisted laser micro-machining technology

更新时间：2026-10-22

- Review of water assisted laser micro-machining technology
- Vol. 52, Issue 7, Pages: 11-19(2020)
- 作者机构：
  
  哈尔滨工业大学机电工程学院,哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：10.11918/201909081
  CLC： V261.8
- Published：2020
- 稿件说明：
移动端阅览
GUO Bing, LIU Wenchao, ZHAO Qingliang, et al. Review of water assisted laser micro-machining technology[J]. 2020, 52(7): 11-19.
DOI：

GUO Bing, LIU Wenchao, ZHAO Qingliang, et al. Review of water assisted laser micro-machining technology[J]. 2020, 52(7): 11-19. DOI： 10.11918/201909081.

摘要

介绍了水辅助激光加工技术的研究现状

系统总结了水辅助激光加工技术的产生原因以及包含的主要技术内容. 针对每种水辅助激光加工技术

详细介绍了国内外研究者在理论与实验方面的主要研究成果

并对不同水辅助激光加工技术之间的技术差异和适用范围进行了论述. 水辅助激光微细加工技术在解决激光加工热损伤导致的精度损失、效率降低等方面具有明显的效果

各种形式的水辅助装置以及组合技术也为类似工程问题解决方案的拟定提供了参考价值.

Abstract

As a new micro-machining technology

water-assisted laser machining (WaLM) has a broad development prospect. The invention and main technical contents of WaLM are summarized

the main research achievements in theoretical and experimental fields for each kind of WaLM technology are introduced in detail

and the technical differences and applied scopes of each WaLM technology are discussed in this paper. The WaLM technology has obvious advantages in solving the problems of precision loss and efficiency reduction caused by laser thermal damage. Various WaLM devices and combination technologies also provide the reference for solutions of engineering problems.

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