Piezoelectric micro-electromechanical systems sensing microsystem for underwater feature information detection

Shengchun PIAO; Yahui LEI; Qiang ZHANG; Xuanzuo GE; Deyong LI; Qifeng JIN; Lijie CHEN

doi:10.11990/jheu.202506018

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Piezoelectric micro-electromechanical systems sensing microsystem for underwater feature information detection

Research Article | 更新时间：2026-03-31

- Piezoelectric micro-electromechanical systems sensing microsystem for underwater feature information detection
- Journal of Harbin Engineering University Vol. 46, Issue 8, Pages: 1635-1643(2025)
- 作者机构：
  
  1.哈尔滨工程大学水声技术重点实验室，黑龙江哈尔滨 150001
  2.哈尔滨工程大学水声工程学院，黑龙江哈尔滨 150001
  3.中国电子科技集团公司第14研究所，江苏南京 210039
- 作者简介：
- 基金信息：
- DOI：10.11990/jheu.202506018
  CLC： TP212
- Received：08 June 2025，
  
  Online First：03 July 2025，
  
  Published：05 August 2025
- 稿件说明：
移动端阅览
Shengchun PIAO, Yahui LEI, Qiang ZHANG, et al. Piezoelectric micro-electromechanical systems sensing microsystem for underwater feature information detection[J]. Journal of Harbin Engineering University, 2025, 46(8): 1635-1643.
DOI：

Shengchun PIAO, Yahui LEI, Qiang ZHANG, et al. Piezoelectric micro-electromechanical systems sensing microsystem for underwater feature information detection[J]. Journal of Harbin Engineering University, 2025, 46(8): 1635-1643. DOI： 10.11990/jheu.202506018.

摘要

在水下信息网络应用中可有针对性地通过检测目标特定特征信息唤醒传感微系统，并通过与环境背景相关的技术方法进行特征信息有无的检测判别和特定特征信息目标的检测。本文基于水下声场频域特征水听器，研制了水下特征信息检测唤醒压电微机电系统传感微系统，通过对特定特征信息的检测及特征信息组合检测实现目标检测与识别。对水下特征信息检测唤醒传感微系统样机进行了验证试验，结果表明：该传感微系统可对预设的不同目标频谱特征信息进行检测，从而在水下通讯或探测系统应用中实现对特定目标或信号的检测唤醒与驱动功能。

Abstract

In underwater information network applications

sensing microsystems can detect targets by obtaining specific feature information. This study expanded upon a previously developed underwater acoustic frequency domain characteristic hydrophone and developed an underwater characteristic information detection and wake-up piezoelectric micro-electromechanical systems sensing microsystem. It achieves target detection and recognition by detecting specific and combined characteristic information. A prototype of an underwater feature information detection wake-up sensing microsystem was validated in the study. The results indicate that the sensing microsystem can detect preset spectral characteristic information of different targets

thereby achieving the detection

awakening

and driving functions for specific targets or signals in underwater communication or detection system applications.

关键词

Keywords

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Related Institution

National Key Laboratory of Underwater Acoustic Technology, Harbin Engineering University

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