High-sensitivity and low-noise piezoelectric micro electro mechanical systems sound pressure hydrophone based on spectral feature detection

Xuanzuo GE; Shengchun PIAO; Qiang ZHANG; Yahui LEI; Lijia GONG; Dacheng WANG; Lijie CHEN

doi:10.11990/jheu.202506025

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High-sensitivity and low-noise piezoelectric micro electro mechanical systems sound pressure hydrophone based on spectral feature detection

Research Article | 更新时间：2026-03-31

- High-sensitivity and low-noise piezoelectric micro electro mechanical systems sound pressure hydrophone based on spectral feature detection
- Journal of Harbin Engineering University Vol. 46, Issue 8, Pages: 1660-1668(2025)
- 作者机构：
  
  1.哈尔滨工程大学水声技术全国重点实验室，黑龙江哈尔滨 150001
  2.海洋信息获取与安全工信部重点实验室(哈尔滨工程大学) 工业和信息化部，黑龙江哈尔滨 150001
  3.哈尔滨工程大学水声工程学院，黑龙江哈尔滨 150001
- 作者简介：
- 基金信息：
- DOI：10.11990/jheu.202506025
  CLC： TP212.6
- Received：09 June 2025，
  
  Online First：02 July 2025，
  
  Published：05 August 2025
- 稿件说明：
移动端阅览
Xuanzuo GE, Shengchun PIAO, Qiang ZHANG, et al. High-sensitivity and low-noise piezoelectric micro electro mechanical systems sound pressure hydrophone based on spectral feature detection[J]. Journal of Harbin Engineering University, 2025, 46(8): 1660-1668.
DOI：

Xuanzuo GE, Shengchun PIAO, Qiang ZHANG, et al. High-sensitivity and low-noise piezoelectric micro electro mechanical systems sound pressure hydrophone based on spectral feature detection[J]. Journal of Harbin Engineering University, 2025, 46(8): 1660-1668. DOI： 10.11990/jheu.202506025.

摘要

针对水下无人平台低噪声高灵敏探测需求，本文提出基于目标频谱特征信息的谐振敏感检测思想。利用水听器在谐振频率处具有高灵敏的特点，根据水下目标的频域特征信息设计水听器敏感结构。本文研制了谐振敏感式压电微机电系统芯片和水听器样机，并进行了实验测试。所设计水听器样机在谐振频率处实现了高灵敏响应(-146 dB@12 kHz (Re.1V/μPa)和-138 dB@4 kHz (Re.1V/μPa))和远低于knudsen零级海况的自噪声水平(M5#样机在谐振频率处等效噪声声压谱密度级22.03 dB@4 kHz(Re. 1μPa/

$$\sqrt{\mathrm{Hz}} $$

))。本文所提出的基于目标特征信息的谐振敏感检测思想为水下目标检测提供了思路。

Abstract

To address the low-power consumption and detection requirements for equipment carried by underwater unmanned platforms. This work proposes the idea of resonant sensitive detection based on target spectral features; that is

the sensitive structure of a hydrophone is designed

leveraging the high sensitivity of hydrophones at the resonant frequency

based on the frequency domain characteristics of underwater targets. Building upon this idea

several piezoelectric MEMS resonant sensitive chips and characteristic sound pressure hydrophones for target frequency domain feature information were designed and developed

and experimental tests were conducted. Sound pressure hydrophone prototypes M3 and M5 achiev

ed high sensitivity responses at their resonant frequencies of -146 dB@12 kHz (Re.1V/μPa)和-138 dB@4 kHz (Re.1V/μPa). These prototypes exhibited self-noise levels far below the Knudsen sea state zero noise levels at the resonant frequency: the equivalent noise spectral density level of M5 prototypes at the resonant frequency was 22.03 dB@4 kHz(Re. 1μPa/

$$ \sqrt{\mathrm{Hz}}$$

)). The proposed concept of resonance-sensitive detection based on target feature information provides a new approach for underwater target detection.

关键词

Keywords

references

LI Jiqiang, ZHANG Guoqing, JIANG Changyan, et al. A survey of maritime unmanned search system: Theory, applications and future directions[J]. Ocean engineering, 2023, 285(1): 115359.

ZHANG Zekai, MI Weishi, Du Jun, et al. Design and Implementation of a Modular UUV Simulation Platform[J]. Sensors, 2022, 22(20): 8043.

JING Yan, LIN Jingsheng and YANG Xian, et. al. Cooperation detection and tracking of underwater target via aerial-surface-underwater vehicles[J]. IEEE Transactions on automatic control, 2025, 70(2): 1068-1083.

LIU Qiongxiao, BAO Jian, SHAO Yunzhu, et al. Dynamic modeling and underwater configuration analysis of fiber optic cable for UUV-launched UAV[J]. Ocean engineering, 2024, 303(1): 117774.

FENG Jingxiang, XU Weicheng, DONG Jingwei, et al. A UUV cluster route-planning method for dynamic target search[J]. Electronics, 2024, 13(20): 4033.

陈丽洁, 雷亚辉, 于洋, 等. 新型氮化铝MEMS声压传感器技术[J]. 哈尔滨工程大学学报, 2021, 42(9): 1355-1362.

CHEN Lijie, LEI Yahui, YU Yang, et al. MEMS sound pressure sensor technology based on a new type of AlN piezoelectric film[J]. Journal of Harbin Engineering University, 2021, 42(9): 1355-1362.

殷敬伟, 多途信道中Pattern时延差编码水声通信研究[D]. 哈尔滨: 哈尔滨工程大学, 2007.

YIN Jingwei. A study of pattern time delay shift coding communication in underwater acoustic multipath channel[D]. Harbin: Harbin Engineering University, 2007.

XU Liang, ZHANG Haigang, ZHANG Minghui. Training a deep operator network as a surrogate solver for two-dimensional parabolic-equation models[J]. Journal of acoustic society of America, 2023, 154(5): 3276-3284.

彭玉婷, 陈丽洁, 王龙奇, 等. DARPA趋零功耗传感器技术及军事应用前景分析[J]. 中国电子科学研究院学报, 2020, 15(11): 1123-1127.

PENG Yuting, CHEN Lijie, WANG Longqi, et al. Analysis of DARPA′s N-ZERO technology and military application prospects[J]. Journal of China academy of electronics and information technology, 2020, 15(11): 1123-1127.

JEONG S, CHEN Yu, JANG T, et al. Always-on 12-nW acoustic sensing and object recognition microsystem for unattended ground sensor nodes[J]. IEEE journal of solid-state circuits, 2017, 53(1): 261-274.

国务院发展研究中心国际技术经济研究所. 世界前沿技术发展报告[R]. 北京: 国务院发展研究中心, 2021.

Development research center of the state council, institute of international technoeconomic research. world frontier technology development report [R]. Beijing: Publishing House of Electronics Industry, 2021.

杨郑. 低功耗低频电磁式水下声源关键技术研究[D]. 杭州: 浙江大学, 2022.

YANG Zheng. Research on key technologies of low-power and low-frequency electromagnetic underwater sound source[D]. Hangzhou: Zhejiang University, 2022.

REINHARDT B, DAW J, TITTMANN B R. Irradiation testing of piezoelectric (aluminum nitride, zinc oxide, and bismuth titanate) and magnetostrictive sensors (remendur and galfenol)[J]. IEEE transactions on nuclear science, 2018, 65(1): 533-538.

XU Jinghui, ZHANG Xiaolin, FERNANDO S N, et al. Aln-on-SOI platform-based MEMS hydrophone with ultra-low operation frequency and ultra-high noise resolution[C]//2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway, NJ, 2016: 1086-1089.

YANG Dengfei, YANG Lei, CHEN Xuying, et al. A piezoelectric AlN MEMS hydrophone with high sensitivity and low noise density[J]. Sensors and actuators A: physical, 2021, 318: 112493.

杨月. 基于氮化铝薄膜的MEMS压电水听器设计与仿真分析[D]. 哈尔滨: 哈尔滨工程大学, 2020.

YANG Yue. Design and simulation analysis of MEMS piezoelectric hydrophone based on AlN thin film[D]. Harbin: Harbin Engineering University, 2020.

陈玄真, 铁煜, 王少坤, 等. 面向水声探测识别的小目标特征提取研究进展[J]. 电子信息对抗技术, 2024, 39(5): 106-120.

CHEN Xuanzhen, TIE Yu, WANG Shaokun, et al. Research advances of small target feature extraction for underwater acoustic detection and recognition[J]. Electronic information warfare technology, 2024, 39(5): 106-120.

李小双. 基于辐射噪声线谱特征的水声目标检测方法研究[D]. 南京: 东南大学, 2023.

LI Xiaoshuang. Research on underwater acoustic target detection method based on radiated noise line spectrum characteristics[D]. Nanjing: Southeast University, 2023.

叶昱清. 船舶水声辐射信号降噪算法和识别技术研究[D]. 青岛: 青岛大学, 2023.

YE Yuqing. Research on denoising algorithms and recognition techniques for ship underwater acoustic radiation signals[D]. Qingdao: Qingdao University, 2023.

王燕, 上官佩熙, 郝宇, 等. 非高斯噪声背景下的目标辐射线谱自适应增强方法[J]. 声学学报, 2024, 49(5): 927-938.

WANG Yan, SHANGGUAN Peixi, HAO Yu, et al. Adaptive enhancer of the target radiated line-spectrum under non-Gaussian noise[J]. Acta acustica, 2024, 49(5): 927-938.

耿搏. 舰船辐射噪声非线性动力学特征提取方法研究[D]. 西安: 西安理工大学, 2023.

GENG Bo. Research on nonlinear dynamical feature extraction method of ship-radiated noise [D]. Xi′an: Xi′an University of Technology, 2023.

李科杰. 新编传感器技术手册[M]. 国防工业出版社出版, 2002.

LI Kejie. New compilation of sensor technology manual [M]. Beijing: National Defense Industry Press, 2002.

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