Zn O thin films were deposited on glass substrates under different substrate temperatures by rf reac-tive sputtering． We have studied the influence of growth temperature on microstructural，photoluminescence proper-ties of Zn O thin films of by X-ray diffraction( XＲD) ，absorption spectrum，photoluminescence spectrum( PL) ． Theresults indicate that Zn O thin films exhibits a hexagonal wurtzite structure with preferred c-axis orientation: absorp-tion coefficient of the Zn O films in the visible region very small，with absorption coefficient is very high in the ultra-violet region; photoluminescence spectra show that the thin films have strong emission of and violet light．