Preparation and Characterization of Graphene Electrode  for Planar Micro-Supercapacitor

ZHANG Guang-yu; YIN Yan; ZHAO Peng-fei; LIU Lin-jing; LI Chuang

doi:10.15938/j.jhust.2019.01.022

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Preparation and Characterization of Graphene Electrode  for Planar Micro-Supercapacitor

更新时间：2026-08-31

- Preparation and Characterization of Graphene Electrode  for Planar Micro-Supercapacitor
- Vol. 24, Issue 1, Pages: 132-137(2019)
- 作者机构：
  
  哈尔滨理工大学应用科学学院,黑龙江,哈尔滨,150080
- 作者简介：
- 基金信息：
- DOI：10.15938/j.jhust.2019.01.022
  CLC： O646
- Published：2019
- 稿件说明：
移动端阅览
ZHANG Guang-yu, YIN Yan, ZHAO Peng-fei, et al. Preparation and Characterization of Graphene Electrode  for Planar Micro-Supercapacitor[J]. 2019, 24(1): 132-137.
DOI：

ZHANG Guang-yu, YIN Yan, ZHAO Peng-fei, et al. Preparation and Characterization of Graphene Electrode  for Planar Micro-Supercapacitor[J]. 2019, 24(1): 132-137. DOI： 10.15938/j.jhust.2019.01.022.

摘要

摘要:为了研究化学气相沉积法（CVD）制备石墨烯电极性能，通过对CVD工艺参数的改进，成功地制备出了符合全固态平面微型超级电容器离子传输机制所需要的石墨烯薄膜电极。对比相同生长时间，不同甲烷浓度的石墨烯薄膜的性能；对比相同甲烷浓度，不同生长时间的石墨烯薄膜性能。结果表明，温度1000℃、甲烷流量35sccm、氢气流量10sccm、生长时间60min时，制备出的石墨烯薄膜质量和性能最好。此时石墨烯薄膜具有较低的薄膜方阻（6028Ω/sq-15575Ω/sq），厚度为125nm。为平面微型超级电容器的进一步研究提供了重要参考。

Abstract

Considering the low performance of graphene electrode preparedby chemical vapor deposition (CVD) method

the graphene film electrode requiredfor the ion transport mechanism of the solid planar micro super capacitor wassuccessfully prepared through improved the craft parameter The properties ofgraphene films with the same growth time and different methane flow rate werecompared

and the performances of graphene films with the same methane flowrate and different growth time were compared The results show that the graphenefilms with the best quality and performance when the growth temperature

methane flow rate

hydrogen flow rate and the growth time were 1000℃

35sccm

10sccm and 60min

respectively Moreover

thegraphene film has a lower Square resistance of 6028Ω/sq-15575Ω/sq

and thethickness of the film is 125nm This study provides an important reference forthe further research of the planar micro capacitor

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