The Surface Roughness Prediction Model of Microlens Array in Slow Tool Servo Cutting

LIN Zeqin; CHEN Xindu; YAN Zhitao; SUN Hao

doi:10.15938/j.jhust.2020.03.013

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The Surface Roughness Prediction Model of Microlens Array in Slow Tool Servo Cutting

更新时间：2026-08-31

- The Surface Roughness Prediction Model of Microlens Array in Slow Tool Servo Cutting
- Vol. 25, Issue 3, Pages: 83-87(2020)
- 作者机构：
  
  广东工业大学机电工程学院广东省微纳制造技术与装备重点实验室,广州,510000
- 作者简介：
- 基金信息：
- DOI：10.15938/j.jhust.2020.03.013
  CLC： TH1611
- Published：2020
- 稿件说明：
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LIN Zeqin, CHEN Xindu, YAN Zhitao, et al. The Surface Roughness Prediction Model of Microlens Array in Slow Tool Servo Cutting[J]. 2020, 25(3): 83-87.
DOI：

LIN Zeqin, CHEN Xindu, YAN Zhitao, et al. The Surface Roughness Prediction Model of Microlens Array in Slow Tool Servo Cutting[J]. 2020, 25(3): 83-87. DOI： 10.15938/j.jhust.2020.03.013.

摘要

摘要:建立了超精密加工微透镜阵列的表面形貌预测模型。基于切削参数、刀具几何参数、微透镜阵列的几何结构，分析了加工的轨迹规划；模型中考虑了刀具与工件之间三维方向相对振动的影响，仿真出加工的表面形貌和粗糙度。通过仿真模型的计算，分析了切削参数、透镜几何参数对微透镜阵列表面形貌及粗糙度的影响。

Abstract

Abstract:A prediction model for the surface topography generation in the ultra precision machining of microlens arrays is established . The tool path generation is analyzed based on the cutting parameters

tool geometry parameters and geometry of microlens array. The tool work vibrations in three dimensional directions are considered in the model to simulate the surface topography and predict the roughness. The influence of cutting parameters and lens’ geometric parameters on the surface topography and roughness of microlens array is studied through the simulation model

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