Mid-infrared gas sensor array based on suspended one-dimensional photonic crystal waveguides

DENG Lipeng; Tang Yi; MENG Fanlong; WANG Pengjun; CHEN Weiwei

doi:10.3788/gzxb20265508.0828002

Chinese

您当前的位置：

首页 >

文章列表页 >

Mid-infrared gas sensor array based on suspended one-dimensional photonic crystal waveguides

更新时间：2026-07-15

- Mid-infrared gas sensor array based on suspended one-dimensional photonic crystal waveguides
- Acta Photonica Sinica Pages: 1-15(2026)
- 作者机构：
  
  1.宁波大学信息科学与工程学院，宁波 315211
  2.温州大学电气与电子工程学院，温州 325035
- 作者简介：
- 基金信息：
  
  National Natural Science Foundation of China(62275134;62234008);Ningbo Natural Science Foundation(2022J099);Ningbo Youth Science and Technology Innovation Leading Talent Project(2023QL003)
- DOI：10.3788/gzxb20265508.0828002
  CLC： TN252
- CSTR：32255.14.gzxb20265508.0828002
- Received：23 April 2026，
  
  Revised：2026-06-01，
  
  Accepted：02 June 2026，
- 稿件说明：
移动端阅览
邓力鹏，汤毅，孟凡龙，等. 基于悬浮一维光子晶体波导的中红外气体传感阵列［J］.光子学报，2026，55（8）：0828002

DENG Lipeng， Tang Yi， MENG Fanlong， et al. Mid-infrared gas sensor array based on suspended one-dimensional photonic crystal waveguides［J］. Acta Photonica Sinica， 2026， 55（8）：0828002
邓力鹏，汤毅，孟凡龙，等. 基于悬浮一维光子晶体波导的中红外气体传感阵列［J］.光子学报，2026，55（8）：0828002 DOI： 10.3788/gzxb20265508.0828002. CSTR： 32255.14.gzxb20265508.0828002.

DENG Lipeng， Tang Yi， MENG Fanlong， et al. Mid-infrared gas sensor array based on suspended one-dimensional photonic crystal waveguides［J］. Acta Photonica Sinica， 2026， 55（8）：0828002 DOI： 10.3788/gzxb20265508.0828002. CSTR： 32255.14.gzxb20265508.0828002.

摘要

本文提出、设计并分析了一种基于悬浮一维光子晶体波导的中红外气体传感阵列，传感阵列由波长-模式解复用器和悬浮一维光子晶体波导组成。其中，悬浮一维光子晶体波导被设计为支持两种传输模式，通过优化其结构参数使相应的慢光区域与甲烷和二氧化碳的吸收光谱重叠，增强了光与气体的相互作用，从而提升传感波导的检测性能。一维光子晶体波导在3.31 µm和4.23 µm处的慢光增强因子为4.06和2.02。波长-模式解复用器基于直接二进制搜索算法逆向设计，实现了TE

模式下4.23 µm和TE

模式下3.31 µm波长的分离，

插入损耗分别为0.36 dB和0.695 dB，串扰分别为-26.8 dB和-29.85 dB。仿真结果表明，传感阵列分别在3.31 µm和4.23 µm处以甲烷和二氧化碳作为待测气体时，检测极限分别为19.65 ppb和4.356 ppb，灵敏度为0.423 Wmol

-1

L和1.925 Wmol

-1

L。

Abstract

Most gas molecules have characteristic absorption peaks in the mid-infrared spectral range， which can be used to analyze the type and concentration of gases. By reducing the group velocity of light， photonic crystal waveguide sensors enhance the interaction strength between light and gas molecules， thereby lowering the limit of detection and improving the sensitivity of the sensor. However， most currently reported photonic crystal waveguides are designed for single-gas detection. Limited by their operating bandwidth， their working spectral range cannot cover the characteristic absorption peaks of multiple gases， which limits their ability to detect multiple gases. Therefore， this work proposed a mid-infrared gas sensor array based on suspended one-dimensional photonic crystal waveguides. The proposed one-dimensional photonic crystal waveguides support two transmission modes， and their slow-light operating ranges match the characteristic absorption wavelengths of methane and carbon dioxide， respectively， thus allowing both gases to be detected.In this work， the Lumerical FDTD software is used to simulate and analyze the performance of the proposed sensor array. According to the Beer-Lambert law， the limit of detection and sensitivity of the sensor are mainly determined by the slow-light enhancement factor and the propagation loss. Therefore， by adjusting the structural parameters of the one-dimensional photonic crystal waveguide， high slow-light enhancement factors can be achieved for the two transmission modes at 3.31 µm and 4.23 µm， while keeping the two target wavelengths sufficiently away from the photonic band edge， thereby reducing the propagation loss. Furthermore， the wavelength-mode demultiplexer is designed and optimized by using the direct binary search （DBS

） algorithm. When TE

modes at wavelengths of 4.23 µm and 3.31 µm are input into the device， they are directed to different output ports. Meanwhile， the TE

mode at 3.31 µm is converted into the TE

mode.On one hand， by adjusting the width and air hole radius of the one-dimensional photonic crystal waveguide， the slow-light operating regions of mode 1 and mode 2 are matched to the absorption peaks of carbon dioxide and methane， respectively. On the other hand， by removing the lower cladding on the underside of the proposed sensor array， the contact area between the evanescent field and the target gas is further increased. Finally， high slow-light enhancement factors are achieved by the proposed sensor array at 4.23 µm and 3.31 µm. Furthermore， the wavelength-mode demultiplexer was optimized using the DBS algorithm， enabling the device to separate the TE

mode at 4.23 µm from the TE

mode at 3.31 µm while being compact. Compared with other mid-infrared gas sensors designed for methane and carbon dioxide， the proposed sensor array can detect methane at 3.31 µm and carbon dioxide at 4.23 µm， and achieves both high slow-light enhancement factors and the low limit of detection.In summary， this work proposed， designed， and analyzed a mid-infrared gas sensor array based on suspended one-dimensional photonic crystal waveguides. By optimizing the structure of the one-dimensional photonic crystal waveguide， the array achieves slow-light enhancement factors of 2.02 at 4.23  µm and 4.06 at 3.31  µm， respectively. After optimization with the DBS algorithm， the wavelength-mode demultiplexer achieves insertion losses of 0.36 dB and 0.695 dB， with corresponding crosstalk values of -26.8 dB and -29.85 dB. Simulation results show that， with methane and carbon dioxide as the target gases， the limits of detection are 19.65 ppb and 4.356 ppb， and the sensitivities are 0.423 Wmol

-1

L and 1.925 Wmol

-1

L， respectively. Based on the above performance， the proposed

sensor array can serve as a reference for the design of sensors for multi-gas detection.

关键词

Keywords

references

WU Jingwen ， YUE Gongcheng ， CHEN Weicheng ， et al . On-chip optical gas sensors based on group-IV materials ［J］. ACS photonics ， 2020 ， 7 （ 11 ）： 2923 - 2940 .

CUI Ruyue ， HAN Wenfei ， WANG Chenglong ， et al . Spatially engineered optical-acoustic matching in quartz-enhanced photoacoustic spectroscopy ［J］. Photoacoustics ， 2026 ， 48 ： 100811 .

GUTIERREZ-ARROYO A ， BAUDET E ， BODIOU L ， et al . Theoretical study of an evanescent optical integrated sensor for multipurpose detection of gases and liquids in the Mid-Infrared ［J］. Sensors and Actuators B： Chemical ， 2017 ， 242 ： 842 - 848 .

ZHENG Chuantao ， PI Mingquan ， SONG Fang ， et al . Recent progress in infrared absorption spectroscopy for gas sensing with discrete optics， hollow-core fibers and on-chip waveguides ［J］. Journal of Lightwave Technology ， 2023 ， 41 （ 13 ）： 4079 - 4096 .

POPA D ， UDREA F . Towards integrated mid-infrared gas sensors ［J］. Sensors ， 2019 ， 19 （ 9 ）： 2076 .

DINH T V ， CHOI I Y ， SON Y S ， et al . A review on non-dispersive infrared gas sensors： Improvement of sensor detection limit and interference correction ［J］. Sensors and Actuators B： Chemical ， 2016 ， 231 ： 529 - 538 .

BUTT M A ， PIRAMIDOWICZ R . Integrated photonic sensors for the detection of toxic gasses—a review ［J］. Chemosensors ， 2024 ， 12 （ 7 ）： 143 .

KUMARI B ， BARH A ， VARSHNEY R K ， et al . Silicon-on-nitride slot waveguide： A promising platform as mid-IR trace gas sensor ［J］. Sensors and Actuators B： Chemical ， 2016 ， 236 ： 759 - 764 .

BUTT M A ， DEGTYAREV S A ， KHONINA S N ， et al . An evanescent field absorption gas sensor at mid-IR 3.39 μm wavelength ［J］. Journal of Modern Optics ， 2017 ， 64 （ 18 ）： 1892 - 1897 .

TOMBEZ L ， ZHANG E ， ORCUTT J S ， et al . Methane absorption spectroscopy on a silicon photonic chip ［J］. Optica ， 2017 ， 4 （ 11 ）： 1322 - 1325 .

Xu Guizhen ， Wang Jin ， Ji Qizheng ， et al . Design and analysis of slow-light Bloch slot waveguides for on-chip gas sensing ［J］. Journal of the Optical Society of America B ， 2020 ， 37 （ 2 ）： 257 - 263 .

CHANDRA V ， RANJAN R . Performance analysis of different slot waveguide structures for evanescent field based gas sensor applications ［J］. Optical and Quantum Electronics ， 2021 ， 53 （ 8 ）： 457 .

ZEGADI R ， LORRAIN N ， BODIOU L ， et al . Enhanced mid-infrared gas absorption spectroscopic detection using chalcogenide or porous germanium waveguides ［J］. Journal of Optics ， 2021 ， 23 （ 3 ）： 035102 .

LIM J ， SHIM J ， KIM I ， et al . Low-loss and high-confinement photonic platform based on germanium-on-insulator at mid-infrared range for optical sensing ［J］. Journal of Lightwave Technology ， 2023 ， 41 （ 9 ）： 2824 - 2833 .

LIM J ， SHIM J ， KIM I ， et al . Ultrasensitive mid-infrared optical gas sensor based on germanium-on-insulator photonic circuits with limit-of-detection at sub-ppm level ［J］. ACS Photonics ， 2024 ， 11 （ 10 ）： 4268 - 4278 .

Pi Mingquan ， Zheng Chuantao ， Zhao Huan ， et al . Ultra-wideband mid-infrared chalcogenide suspended nanorib waveguide gas sensors with exceptionally high external confinement factor beyond free-space ［J］. ACS Nano ， 2023 ， 17 ： 17761 - 17770 .

BUTT M A ， PIRAMIDOWICZ R . Suspended slot membrane waveguide based on germanium-on-silicon-on-insulator at λ = 4.23 µm for CO₂ monitoring ［J］. Micromachines ， 2024 ， 15 （ 12 ）： 1434 .

Lin Pensheng ， QUELLMALZ A ， PARHIZKAR S ， et al . Atmospheric-level carbon dioxide gas sensing using low-loss mid-IR silicon waveguides ［J］. Optics Express ， 2025 ， 33 （ 2 ）： 3511 - 3521 .

Lin Pensheng ， HELLSTRÖM P E ， ZERVOS C ， et al . Suspended germanium-on-silicon photonic integrated circuits operating in the long-wave infrared and their use for ethanol sensing ［J］. ACS Photonics ， 2026 ， 13 ： 2637 - 2644 .

GERVAIS A ， JEAN P ， SHI Wei ， et al . Design of slow-light subwavelength grating waveguides for enhanced on-chip methane sensing by absorption spectroscopy ［J］. IEEE Journal of Selected Topics in Quantum Electronics ， 2018 ， 25 （ 3 ）： 1 - 8 .

Peng Zihang ， Huang Yijun ， Zheng Kaiyuan ， et al . Slow-light-enhanced on-chip 1D and 2D photonic crystal waveguide gas sensing in near-IR with an ultrahigh interaction factor ［J］. Photonics Research ， 2023 ， 11 （ 10 ）： 1647 - 1656 .

Pi Mingquan ， Zheng Chuantao ， Bi Ran ， et al . Design of a mid-infrared suspended chalcogenide/silica-on-silicon slot-waveguide spectroscopic gas sensor with enhanced light-gas interaction effect ［J］. Sensors and Actuators B： Chemical ， 2019 ， 297 ： 126732 .

OTTONELLO-BRIANO F ， ERRANDO-HERRANZ C ， RÖDJEGÅRD H ， et al . Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide ［J］. Optics Letters ， 2019 ， 45 （ 1 ）： 109 - 112 .

YOO K M ， MIDKIFF J ， ROSTAMIAN A ， et al . InGaAs membrane waveguide： a promising platform for monolithic integrated mid-infrared optical gas sensor ［J］. ACS sensors ， 2020 ， 5 （ 3 ）： 861 - 869 .

VLK M ， DATTA A ， ALBERTI S ， et al . Extraordinary evanescent field confinement waveguide sensor for mid-infrared trace gas spectroscopy ［J］. Light： Science Applications ， 2021 ， 10 （ 1 ）： 26 .

KIM I ， LIM J ， SHIM J ， et al . Freestanding germanium photonic crystal waveguide for a highly sensitive and compact mid-infrared on-chip gas sensor ［J］. ACS sensors ， 2024 ， 9 （ 10 ）： 5116 - 5126 .

CHARRIER J ， BRANDILY M L ， LHERMITE H ， et al . Evanescent wave optical micro-sensor based on chalcogenide glass ［J］. Sensors and Actuators B： Chemical ， 2012 ， 173 ： 468 - 476 .

皮明权，郑传涛，梁磊，等 . 片上红外气体传感技术的研究进展（特邀）［J］. 光子学报， 2023 ， 52 （ 3 ）： 0352106 .

EK S ， LUNNEMANN P ， CHEN Yaohui ， et al . Slow-light-enhanced gain in active photonic crystal waveguides ［J］. Nature Communications ， 2014 ， 5 （ 1 ）： 5039 .

KASPAR P ， KAPPELER R ， ERNI D ， et al . Average light velocities in periodic media ［J］. Journal of the Optical Society of America B ， 2013 ， 30 （ 11 ）： 2849 - 2854 .

ZOU Yi ， CHAKRAVARTY S ， CHUNG Chijui ， et al . Mid-infrared silicon photonic waveguides and devices ［J］. Photonics Research ， 2018 ， 6 （ 4 ）： 254 - 276 .

Zhang Dong ， Liao Jie ， Wang Pengjun ， et al . Broadband and high-enhancement-factor integrated long-wave infrared sensor using the photonic crystal assisted subwavelength grating waveguide ［J］. Journal of the Optical Society of America B ， 2024 ， 41 （ 5 ）： 1170 - 1179 .

Payne F P ， Lacey J P R . A theoretical analysis of scattering loss from planar optical waveguides ［J］. Optical and Quantum Electronics ， 1994 ， 26 （ 10 ）： 977 - 986 .

GORDON I E ， ROTHMAN L S ， HARGREAVES R J ， et al . The HITRAN2024 molecular spectroscopic database ［J］. Journal of Quantitative Spectroscopy and Radiative Transfer ， 2026 ： 109807 .

DUONG DINH T T ， LE ROUX X ， KOOMPAI N ， et al . Mid-infrared Fourier-transform spectrometer based on metamaterial lateral cladding suspended silicon waveguides ［J］. Optics letters ， 2022 ， 47 （ 4 ）： 810 - 813 .

PENADES J S ， ORTEGA-MOÑUX A ， NEDELJKOVIC M ， et al . Suspended silicon mid-infrared waveguide devices with subwavelength grating metamaterial cladding ［J］. Optics express ， 2016 ， 24 （ 20 ）： 22908 - 22916 .

KUMARI B ， VARSHNEY R K ， PAL B P . Design of chip scale silicon rib slot waveguide for sub-ppm detection of N2O gas at mid-IR band ［J］. Sensors and Actuators B： Chemical ， 2018 ， 255 ： 3409 - 3416 .

JOSHI K ， MEENA B L ， GEHLOT K . Universal multigas evanescent field absorption sensor in mid IR based on SOS slot waveguide ［J］. Optical and Quantum Electronics ， 2025 ， 57 （ 1 ）： 93 .

RANACHER C ， CONSANI C ， VOLLERT N ， et al . Characterization of evanescent field gas sensor structures based on silicon photonics ［J］. IEEE Photonics Journal ， 2018 ， 10 （ 5 ）： 1 - 14 .

Zhao Huan ， Zheng Chuantao ， Pi Mingquan ， et al . On-chip mid-infrared silicon-on-insulator waveguide methane sensor using two measurement schemes at 3.291 μm ［J］. Frontiers in chemistry ， 2022 ， 10 ： 953684 .

Pi Mingquan ， Zheng Chuantao ， Peng Zihang ， et al . Theoretical study of microcavity-enhanced absorption spectroscopy for mid-infrared methane detection using a chalcogenide/silica-on-fluoride horizontal slot-waveguide racetrack resonator ［J］. Optics Express ， 2020 ， 28 （ 15 ）： 21432 - 21446 .

SALAJ J ， VLK M ， ZAKOLDAEV R ， et al . Suspended nanophotonic waveguide for isotope-specific CO2 detection ［J］. Optica ， 2024 ， 11 （ 12 ）： 1654 - 1662 .

YALLEW H D ， VLK M ， DATTA A ， et al . Sub-ppm methane detection with mid-infrared slot waveguides ［J］. ACS photonics ， 2023 ， 10 （ 12 ）： 4282 - 4289 .

KUMAR H ， SONI N ， YADAV J . Chip-scale Ge1-xSnx-based uniform cross-slot optical waveguide sensors for methane detection in the mid-infrared region ［J］. Journal of the Optical Society of America B ， 2025 ， 42 （ 9 ）： 1907 - 1917 .

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Fully Integrated Kerr-lens Mode-locked Ceramic Laser for Low-noise Clock （Invited）

Preparation of As2S3 Chalcogenide Ridge Optical Waveguide with Covering Layer by Hot Stamping Technique

Research on High Efficiency and High Compactness Vertical Silicon-based Grating Couplers

Regulation Method of Fano Resonance Effect Based on Deep Learning in Micro-ring Resonators

Preparation of As2S3 Chalcogenide Ridge Waveguide Based on AZ5214 Photoprotective Layer

Related Author

ZHANG Tong

SHI Qiaoya

FENG Ye

WANG Chen

WANG Yishan

MA Caiwen

HU Hai

ZOU Liner

Related Institution

University of Chinese Academy of Sciences

Xi'an Institute of Optics and Precision Mechanics， Chinese Academy of Sciences

School of Physics and Materials Science， Nanchang University

Lanzhou Vacuum Equipment Co.， Ltd.

Lanzhou Institute of Space Technology Physics

AI问答

Postal code：100079
Tel：（010）53879206 Email：tmw@bjxintong.com.cn
Technical support is provided by Beijing Founder electronics co., LTD 京ICP备09082226号-64 京公网安备11010602201714号
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰