1. 中国科学院 微电子研究所,北京,100029
2. 中国科学院 机构 硅器件与技术重点实验室,北京,100029
3. 中国科学院大学 机构,北京,101408
纸质出版:2018
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黄云波, 李博, 杨玲, 郑中山, 李彬鸿, 罗家俊. 体硅nFinFET总剂量效应三维TCAD仿真研究[J]. 微电子学与计算机, 2018, 35(8): 42-47.
HUANG Yun-bo, LI Bo, YANG Ling, et al. Three-dimensional TCAD Simulation Study of the Total Ionizing Dose Effect on Bulk nFinFET[J]. 2018, 35(8): 42-47.
本文利用Sentaurus TCAD仿真软件对体硅鳍形场效应晶体管(FinFET)的总剂量效应(TID)进行了详细的数值模拟研究.基于良好校准后的器件模型
仿真结果表明:高沟道阻挡层掺杂浓度
大鳍宽
锥形鳍截面形状的FinFET器件对总剂量效应有良好的抑制作用.进一步的Gamma总剂量辐射仿真展示了辐照过程中浅槽隔离(STI)氧化层中陷阱空穴的形成.最后
利用Sentaurus TCAD软件混合仿真模式对电路级别的总剂量响应进行了模拟分析
结果表明电路的性能和可靠性在总剂量辐照之后均受到了极大的影响.
Using Technology Computer Aided Design (TCAD) simulation
the total ionizing dose(TID)effect of bulk fin field-effect transistor(FinFET) is investigated in detail. Based on well calibrated device model generated
it is shown that FinFETs with high channel stop doping concentration
large fin width and tapered fin cross-section shape exhibit great TID immunity. Further gamma radiation simulation illustrates the evolution of trapped holes in shallow trench isolation (STI) oxide. In addition
circuit level response of TID effect is analyzed using Sentaurus mixed-mode simulation method. It is demonstrated that the performance and stability suffer adverse degeneration during TID.
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Chatterjee I, Zhang E X, Bhuva B L, et al.Bias dependence of total-dose effects in bulk FinFETs[J]. IEEE Transactions on Nuclear Science, 2013(60):4476-4482. DOI: 4476
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