Cu and the Al films were spread separately in the surface of SiO2 glass substrate by vacuum evapora-tion machine. In this paper

24 aluminum or copper film samples with three parameters were prepared by six times.The result indicates that under the same technique condition

the thicker aluminium films have larger adherencethan the copper ones and are much easier to fom films whose structure is uniform.Analysis by XPS shows:NO.2

9

l 1 aluminium film samples and NO.6

7 copper ones are better that others in pur...