Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

Zilong Zhang; Yuanzhao Wu; Liwen Sang; Haihua Wu; Jian Huang; Linjun Wang; Yukiko Takahashi; Runwei Li; Satoshi Koizumi; Masaya Toda; Indianto Mohammad Akita; Yasuo Koide; Meiyong Liao

doi:10.1080/21663831.2020.1734680

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Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

Original Report | 更新时间：2026-08-19

- Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures
- Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures
- 材料研究快报（英文） 2020年8卷第5期页码：180-186
- 作者机构：
  
  1. National Institute for Materials Science Tsukuba Japan
  2. Chinese Academy of SciencesNingbo, People’s Republic of China
  3. National Institute for Materials Science
  4. School of Materials Science and Engineering Shanghai University
  5. Graduate School of Engineering Tohoku University
- 作者简介：
- 基金信息：
- DOI：10.1080/21663831.2020.1734680
  中图分类号：
- 网络首发：2020-03-02，
  
  纸质出版：2020
- 稿件说明：
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Zilong Zhang, Yuanzhao Wu, Liwen Sang, 等. Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures[J]. 材料研究快报（英文）, 2020,8(5):180-186.

Zilong Zhang, Yuanzhao Wu, Liwen Sang, et al. Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures[J]. Materials Research Letters, 2020, 8(5): 180-186.
Zilong Zhang, Yuanzhao Wu, Liwen Sang, 等. Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures[J]. 材料研究快报（英文）, 2020,8(5):180-186. DOI： 10.1080/21663831.2020.1734680.

Zilong Zhang, Yuanzhao Wu, Liwen Sang, et al. Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures[J]. Materials Research Letters, 2020, 8(5): 180-186. DOI： 10.1080/21663831.2020.1734680.

摘要

Abstract

BSTRACTMicro-electromechanical systems (MEMS) magnetic sensing at high temperatures over 573 K has not been achieved due to the difficulty in designing the rational interface with strong coupling. Here

a magnetic sensor based on FeGa/single-crystal diamond (SCD) MEMS resonator is realized to circumvent the challenges in magnetic sensing. The present magnetic sensor exhibits a stable high-sensitivity of 7.3 Hz/mT at 573 K and an experimental noise level of ~4nT/√Hz. The performance exceeds those of reported high-temperature magnetic sensors. This work offers a strategy for developing magnetic sensors with merits super to the existing ones.

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