Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

Jonas Hafner; Marco Teuschel; Davide Disnan; Michael Schneider; Ulrich Schmid

doi:10.1080/21663831.2020.1868593

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Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

Original Report | 更新时间：2026-08-19

- Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators
- Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators
- 材料研究快报（英文） 2021年9卷第4期页码：195-203
- 作者机构：
  
  Institute of Sensor and Actuator Systems TU Wien
- 作者简介：
- 基金信息：
- DOI：10.1080/21663831.2020.1868593
  中图分类号：
- 网络首发：2021-01-17，
  
  纸质出版：2021
- 稿件说明：
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Jonas Hafner, Marco Teuschel, Davide Disnan, 等. Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators[J]. 材料研究快报（英文）, 2021,9(4):195-203.

Jonas Hafner, Marco Teuschel, Davide Disnan, et al. Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators[J]. Materials Research Letters, 2021, 9(4): 195-203.
Jonas Hafner, Marco Teuschel, Davide Disnan, 等. Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators[J]. 材料研究快报（英文）, 2021,9(4):195-203. DOI： 10.1080/21663831.2020.1868593.

Jonas Hafner, Marco Teuschel, Davide Disnan, et al. Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators[J]. Materials Research Letters, 2021, 9(4): 195-203. DOI： 10.1080/21663831.2020.1868593.

摘要

Abstract

Piezoelectricity in ferroelectrics arises from electrostriction biased by their spontaneous polarisation

which can be enhanced through a bias-induced polarisation. Doing so

the piezoelectric response can be tuned and significantly enhanced. In this study

the ferroelectric polymer P(VDF-TrFE) was used to electro-mechanically excite a silicon microcantilever. Using this device

we demonstrate that a bias-induced polarisation improves the piezoelectric response of P(VDF-TrFE). To distinguish between the linear piezoelectric and quadratic electrostrictive effect

lock-in measurements were performed in order to separate the characteristic frequency response of both electro-mechanical phenomena. This work shows the potential for MEMS devices having controllable actuating and sensing properties.

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