The superfluid gyroscope

atomic gyroscope and micro-hemispherical gyroscope have the possibility of high precision and miniaturization which make them the promising gyroscopes. The preparation quality of the key component of these three gyroscopes will directly affect their working performance

so it is necessary to perform in-depth research on the status of the key component preparation processes. Firstly

the structural characteristics

quality and technical indicators and their effect

and preparation technical requirements of these key components are briefly described. On this basis

the research progress on the fabrication technology of high-precision micro gyroscope key components is described

and the manufacturing processes such as the commonly used MEMS processing technology and micro-nano processing technology are reviewed in detail. By comparatively analyzing the preparation process of each key component

the advantages and limitations of each related process are emphasized. For micro-resonators

the process characteristics of mold processing technology in each preparation process and their influence on the quality of the micro-resonator are analyzed. Through analyzing the research progress of the preparation methods of each key component

the existing problems and challenges are discussed to provide a reference for the subsequent combination of micro-nano manufacturing technology and gyroscope technology

and further to promote the practical engineering application of related preparation technologies.