谐振敏感式低噪声压电微机电系统水听器

葛宣佐; 朴胜春; 张强; 雷亚辉; 龚李佳; 王大成; 陈丽洁

doi:10.11990/jheu.202506025

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谐振敏感式低噪声压电微机电系统水听器

论文 | 更新时间：2026-03-31

- 谐振敏感式低噪声压电微机电系统水听器
- High-sensitivity and low-noise piezoelectric micro electro mechanical systems sound pressure hydrophone based on spectral feature detection
- 哈尔滨工程大学学报 2025年46卷第8期页码：1660-1668
- 作者机构：
  
  1.哈尔滨工程大学水声技术全国重点实验室，黑龙江哈尔滨 150001
  2.海洋信息获取与安全工信部重点实验室(哈尔滨工程大学) 工业和信息化部，黑龙江哈尔滨 150001
  3.哈尔滨工程大学水声工程学院，黑龙江哈尔滨 150001
- 作者简介：
  
  [ "葛宣佐, 男, 博士研究生" ]
  [ "张强, 男, 副教授, 博士" ]
- 基金信息：
  
  国家自然科学基金项目(52375529)
- DOI：10.11990/jheu.202506025
  中图分类号： TP212.6
- 收稿：2025-06-09，
  
  网络首发：2025-07-02，
  
  纸质出版：2025-08-05
- 稿件说明：
移动端阅览
葛宣佐, 朴胜春, 张强, 等. 谐振敏感式低噪声压电微机电系统水听器[J]. 哈尔滨工程大学学报, 2025,46(8):1660-1668.

Xuanzuo GE, Shengchun PIAO, Qiang ZHANG, et al. High-sensitivity and low-noise piezoelectric micro electro mechanical systems sound pressure hydrophone based on spectral feature detection[J]. Journal of Harbin Engineering University, 2025, 46(8): 1660-1668.
葛宣佐, 朴胜春, 张强, 等. 谐振敏感式低噪声压电微机电系统水听器[J]. 哈尔滨工程大学学报, 2025,46(8):1660-1668. DOI： 10.11990/jheu.202506025.

Xuanzuo GE, Shengchun PIAO, Qiang ZHANG, et al. High-sensitivity and low-noise piezoelectric micro electro mechanical systems sound pressure hydrophone based on spectral feature detection[J]. Journal of Harbin Engineering University, 2025, 46(8): 1660-1668. DOI： 10.11990/jheu.202506025.

摘要

针对水下无人平台低噪声高灵敏探测需求，本文提出基于目标频谱特征信息的谐振敏感检测思想。利用水听器在谐振频率处具有高灵敏的特点，根据水下目标的频域特征信息设计水听器敏感结构。本文研制了谐振敏感式压电微机电系统芯片和水听器样机，并进行了实验测试。所设计水听器样机在谐振频率处实现了高灵敏响应(-146 dB@12 kHz (Re.1V/μPa)和-138 dB@4 kHz (Re.1V/μPa))和远低于knudsen零级海况的自噪声水平(M5#样机在谐振频率处等效噪声声压谱密度级22.03 dB@4 kHz(Re. 1μPa/

$$\sqrt{\mathrm{Hz}} $$

))。本文所提出的基于目标特征信息的谐振敏感检测思想为水下目标检测提供了思路。

Abstract

To address the low-power consumption and detection requirements for equipment carried by underwater unmanned platforms. This work proposes the idea of resonant sensitive detection based on target spectral features; that is

the sensitive structure of a hydrophone is designed

leveraging the high sensitivity of hydrophones at the resonant frequency

based on the frequency domain characteristics of underwater targets. Building upon this idea

several piezoelectric MEMS resonant sensitive chips and characteristic sound pressure hydrophones for target frequency domain feature information were designed and developed

and experimental tests were conducted. Sound pressure hydrophone prototypes M3 and M5 achiev

ed high sensitivity responses at their resonant frequencies of -146 dB@12 kHz (Re.1V/μPa)和-138 dB@4 kHz (Re.1V/μPa). These prototypes exhibited self-noise levels far below the Knudsen sea state zero noise levels at the resonant frequency: the equivalent noise spectral density level of M5 prototypes at the resonant frequency was 22.03 dB@4 kHz(Re. 1μPa/

$$ \sqrt{\mathrm{Hz}}$$

)). The proposed concept of resonance-sensitive detection based on target feature information provides a new approach for underwater target detection.

关键词

Keywords

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