Positioning accuracy is a key index to measure the motion accuracy of precision moving platform. In this paper

by analyzing the error sources of the ball-screw pair of high precision moving platform

revealing the law of positioning accuracy transmission

establishing the error model of the lead error

and taking a kind of ball screw pair as the main research object

this paper proposed the prediction and compensation method of full-stroke positioning error of precision moving platform under macro (10 mm)

small (1 mm) and micro(0.1 mm) stroke scales. Firstly

the mechanical characteristics of the ball screw pair of precision movement platform were analyzed

and the error source information was extracted. Secondly

the formation characteristics of the ball screw installation error

assembly error and lead error were analyzed respectively. Meanwhile

the information of each error item was decoupled

the comprehensive positioning error model of the precision movement platform was established with the ball screw pair as the object. Finally

based on the ball screw pair positioning error model

the mechanism of positioning error of precision motion platform under macro

small and micro strokes was analyzed

and the mapping law of ball screw pair error parameters and positioning error of precision motion platform under different strokes was revealed. Thus

the full-stroke positioning accuracy prediction and compensation method was proposed. The experimental results show that

according to the error model

positioning errors of 20 mm

2 mm and 0.2 mm stroke precision motion platform were compensated respectively. The results decreased from 13.7 μm

7.9 μm and 4.6 μm to 2.0 μm

1.5 μm and 1.0 μm respectively

which shows the positioning accuracy was improved obviously.