Considering the low performance of graphene electrode preparedby chemical vapor deposition (CVD) method

the graphene film electrode requiredfor the ion transport mechanism of the solid planar micro super capacitor wassuccessfully prepared through improved the craft parameter The properties ofgraphene films with the same growth time and different methane flow rate werecompared

and the performances of graphene films with the same methane flowrate and different growth time were compared The results show that the graphenefilms with the best quality and performance when the growth temperature

methane flow rate

hydrogen flow rate and the growth time were 1000℃

35sccm

10sccm and 60min

respectively Moreover

thegraphene film has a lower Square resistance of 6028Ω/sq-15575Ω/sq

and thethickness of the film is 125nm This study provides an important reference forthe further research of the planar micro capacitor