正向与反向入射条件下非偏振分光棱镜偏振特性研究

佟雅楠; 吕凝睿; 李静怡; 陈兴达; 宫平; 马辰昊; 罗敬

doi:10.3788/gzxb20265503.0326001

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正向与反向入射条件下非偏振分光棱镜偏振特性研究

物理光学 | 更新时间：2026-04-21

- 正向与反向入射条件下非偏振分光棱镜偏振特性研究
- Polarization Characteristics of Non-polarizing Beam Splitter under Forward and Reverse Incidence Conditions
- 光子学报 2026年55卷第3期页码：217-229
- 作者机构：
  
  1.长春理工大学光电工程学院，长春 130022
  2.中国科学院长春光学精密机械与物理研究所，长春 130022
- 作者简介：
  
  佟雅楠，17519155037@163.com
  马辰昊，mach@cust.edu.cn
- 基金信息：
  
  吉林省自然科学基金(20260101044JJ);国家重点研发计划(2021YFC2802100);吉林省科技发展计划项目支持(20240404052ZP);中国科学院B类先导专项(XDB1050000);国家自然科学基金(12473085;12003033);中国科学院青年创新促进会(2023225);智元实验室(ZYL2024016)
- DOI：10.3788/gzxb20265503.0326001
  中图分类号： O436.3
- CSTR：32255.14.gzxb20265503.0326001
- 收稿：2025-11-09，
  
  修回：2025-12-26，
  
  录用：2026-01-14，
  
  纸质出版：2026-03-25
- 稿件说明：
移动端阅览
佟雅楠，吕凝睿，李静怡，等. 正向与反向入射条件下非偏振分光棱镜偏振特性研究［J］.光子学报，2026，55（3）：0326001

TONG Yanan， LV Ningrui， LI Jingyi， et al. Polarization Characteristics of Non-polarizing Beam Splitter under Forward and Reverse Incidence Conditions［J］. Acta Photonica Sinica， 2026， 55（3）：0326001
佟雅楠，吕凝睿，李静怡，等. 正向与反向入射条件下非偏振分光棱镜偏振特性研究［J］.光子学报，2026，55（3）：0326001 DOI： 10.3788/gzxb20265503.0326001. CSTR： 32255.14.gzxb20265503.0326001.

TONG Yanan， LV Ningrui， LI Jingyi， et al. Polarization Characteristics of Non-polarizing Beam Splitter under Forward and Reverse Incidence Conditions［J］. Acta Photonica Sinica， 2026， 55（3）：0326001 DOI： 10.3788/gzxb20265503.0326001. CSTR： 32255.14.gzxb20265503.0326001.

摘要

针对复杂光学系统中存在非偏振分光棱镜必须反向使用的情况，对其在不同入射方向下的偏振特性进行了分析和试验测试。在仿真研究中，基于Essential Macleod软件构建了非偏振分光棱镜的分光膜层结构，定量计算了正向与反向入射时各个通道的二向衰减和相位延迟。在此基础上，利用高精度穆勒矩阵椭偏仪对非偏振分光棱镜进行测量，进而得到其偏振特性参数，测量结果与仿真分析基本一致。结果表明，对于非偏振分光棱镜的透射通道，其偏振性质在光线正向入射和反向入射时基本一致。然而对于反射通道，光线正向入射和反向入射时非偏振分光棱镜的偏振特性差异显著，在整个波长范围内，二向衰减最大差值（即反向入射结果减去正向入射结果）约为0.11，平均差值约为0.03；相位延迟最大差值约为51.5°，平均差值约为28.76°。显然，非偏振分光棱镜的偏振性质与光线的入射方向密切相关。本文定量分析和实测了不同入射方向下非偏振分光棱镜的偏振特性，对于提升含非偏振分光棱镜精密光学系统、优化非偏振分光棱镜设计和使用等均具有重要意义。

Abstract

Non-polarizing beam splitter is an optical component widely used for beam splitting. It is primarily designed to divide incident light into two beams with specified reflection and transmission ratios while maintaining the original polarization state of the input light. Thanks to its low polarization discrimination， minimal stress birefringence， and strong polarization-maintaining capability， non-polarizing beam splitters are extensively employed in optical systems such as space remote sensing， projectors， and Michelson interferometers. Although an ideal non-polarizing beam splitter is designed to preserve the polarization state of the incident light， practical non-polarizing beam splitters exhibit certain non-ideal polarization characteristics due to inherent limitations in materials and coating designs. Moreover， these polarization properties are highly sensitive to both the angle and direction of the incident light. In some complex optical systems， a non-polarizing beam splitter may need to simultaneously process light incident from both forward and reverse directions， inevitably operating under reverse incidence. Therefore， a systematic study of the polarization properties of the non-polarizing beam splitter under reverse incidence is of great significance for high-precision optical measurement and polarization-sensitive systems. Currently， most research focuses on the influence of factors such as temperature and angular deviation on the polarization performance of the non-polarizing beam splitter， while studies on polarization characteristics under reverse incidence remain limited. This paper addresses scenarios in complex optical systems where the non-polarizing beam splitter must be used in reverse. We systematically analyze the polarization properties of the non-polarizing beam splitter under different incident directions from three perspectives： fundamental principles， simulation analysis， and experimental validation. The variations in polarization characteristics of both reflected and transmitted channels with respect to incident wavelength are analyzed and compared， and the mechanism underlying the influence of incident direction on the polarization properties of the non-polarizing beam splitter is revealed.

To achieve this objective， a combined theoretical， numerical， and experimental approach was adopted. Numerical simulations were performed using Essential Macleod thin-film design software to construct a realistic model of a non-polarizing beam splitter coating stack. The model enabled quantitative calculation of wavelength-dependent polarization parameters， including diattenuation and phase retardation， for both reflected and transmitted channels under forward and reverse incidence conditions. The simulations covered the visible spectral range and assumed identical angles of incidence for both illumination directions to isolate the effect of direction reversal. To validate the simulation results， high-precision experimental measurements were conducted using Mueller matrix ellipsometer. Commercial non-polarizing beam splitter samples （models CCM1-BS013/M and CCM5-BS016/M） were selected as representative specimens. The complete 4×4 Mueller matrices of the samples were measured over a wavelength range from 380 nm to 800 nm under both forward and reverse illumination. Subsequently， the Lu-Chipman decomposition method was applied to the measured Mueller matrices to extract key polarization parameters， specifically diattenuation and phase retardation， for the reflected and transmitted channels. Multiple measurements were performed to ensure repeatability and to assess sample-to-sample consistency.

The simulation results reveal a pronounced dependence of polarization characteristics on the direction of incident light， particularly for the reflected channel of the non-polarizing beam splitter. Under forward and reverse incidence， substantial discrepancies were observed in both diattenuation and phase retardation of the reflected beam. Specifically， the maximum change in phase retardation between the two incidence conditions reached approximately 53.64°， with an average variation on the order of 29.49°， while the maximum difference in diattenuation was approximately 0.321， with an average difference of about 0.027 3. These findings indicate that reversing the illumination direction significantly alters the polarization behavior of the reflected channel. In contrast， the transmitted channel exhibited negligible variation in both diattenuation and phase retardation across the same conditions. Experimental measurements corroborated these trends with strong qualitative and quantitative agreement. Mueller matrix ellipsometry data showed that， for the reflected channel， the maximum difference in diattenuation between forward and reverse incidence was approximately 0.11， with an average difference of around 0.03， while the maximum difference in phase retardation reached approximately 51.5°， with an average difference of about 28.76°. Importantly， repeated experiments on different non-polarizing beam splitter samples consistently demonstrated the same directional dependence： significant polarization variation in the reflected channel and nearly identical polarization behavior in the transmitted channel under both illumination directions.

关键词

Keywords

references

ZHANG Bo ， YAN Liping ， DIAO Xiaofei . Effect of alignment error of wave plate array on nonlinear error of laser interference ［J］. Chinese Journal of Laser ， 2022 ， 49 （ 9 ）： 83 - 91 .

张博，严利平，刁晓飞 . 波片阵列对准误差对激光干涉非线性误差的影响［J］. 中国激光， 2022 ， 49 （ 9 ）： 83 - 91 . DOI: 10.3788/cjl202249.0904003 http://dx.doi.org/10.3788/cjl202249.0904003

ZHANG Peng ， CUI Jianjun . Research progress in nonlinear error compensation suppression and measurement of heterodyne interferometer ［J］. Laser & Optoelectronics Progress ， 2021 ， 58 （ 11 ）： 38 - 50 .

张鹏，崔建军 . 外差干涉仪非线性误差补偿抑制与测量研究进展［J］. 激光与光电子学进展， 2021 ， 58 （ 11 ）： 38 - 50 . DOI: 10.3788/LOP202158.1100003 http://dx.doi.org/10.3788/LOP202158.1100003

YU Haijiao ， ZHAO Guogang . Improving measurement accuracy of dual-frequency laser interferometer based on vibration node optimization ［J］. Laser & Optoelectronics Progress ， 2020 ， 57 （ 15 ）： 100 - 107 .

于海娇，赵国罡 . 基于振动节点优化提高双频激光干涉仪的测量精度［J］. 激光与光电子学进展， 2020 ， 57 （ 15 ）： 100 - 107 . DOI: 10.3788/lop57.151202 http://dx.doi.org/10.3788/lop57.151202

ZHAO Shijie ， WEI Haoyun ， ZHU Minhao ， et al . Green laser interferometric metrology system with sub-nanometer periodic nonlinearity ［J］. Applied Optics ， 2016 ， 55 （ 11 ）： 3006 - 3011 .

SHI Jinhui ， WANG Zhengping ， GUAN Chunying ， et al . Multi-wavelength metal-dielectric nonpolarizing beam splitters in the near-infrared range ［J］. Optics and Laser Technology ， 2010 ， 43 （ 3 ）： 515 - 518 .

SHI Jinhui ， ZHU Zheng ， WANG Zhengping ， et al . Theoretical design of a novel metal-dielectric non-polarizing beam splitter in the visible range ［J］. Acta Optica Sinica ， 2010 ， 31 （ 6 ）： 100303 .

史金辉，朱正，王政平，等 . 可见光波段金属-介质膜消偏振分光镜的理论设计［J］. 光学学报， 2010 ， 31 （ 6 ）： 100303 . DOI: 10.3788/aos201131.s100303 http://dx.doi.org/10.3788/aos201131.s100303

GAO Shan ， MENG Chen ， CUI Shengwei ， et al . Phase shift measurements of non-polarized beam splitter and its temperature characteristics ［J］. Laser & Optoelectronics Progress ， 2023 ， 60 （ 17 ）： 188 - 194 .

高珊，孟晨，崔省伟，等 . 非偏振分光棱镜的相移测量及其温度特性研究［J］. 激光与光电子学进展， 2023 ， 60 （ 17 ）： 188 - 194 . DOI: 10.3788/lop222256 http://dx.doi.org/10.3788/lop222256

MENG Chen ， GAO Shan ， YAO Xiaotian ， et al . Polarization sensitivity measurement method for non-polarizing beam splitters ［J］. Chinese Journal of Laser ， 2023 ， 50 （ 5 ）： 82 - 90 .

孟晨，高珊，姚晓天，等 . 非偏振分光棱镜的偏振敏感度测量［J］. 中国激光， 2023 ， 50 （ 5 ）： 82 - 90 . DOI: 10.3788/cjl220909 http://dx.doi.org/10.3788/cjl220909

DENG Yuanlong ， LI Xuejin ， GENG Youfu ， et al . Influence of nonpolarizing beam splitters on nonlinear error in heterodyne interferometers ［J］. Acta Optica Sinica ， 2012 ， 32 （ 11 ）： 154 - 159 .

邓元龙，李学金，耿优福，等 . 非偏振分光镜对外差干涉仪非线性误差的影响［J］. 光学学报， 2012 ， 32 （ 11 ）： 154 - 159 . DOI: 10.3788/aos201232.1112008 http://dx.doi.org/10.3788/aos201232.1112008

SHI Jinhui ， WANG Zhengping . Design and characteristics analysis of non-polarizing beam splitters ［J］. Journal of Harbin Engineering University ， 2008 ，（ 9 ）： 1019 - 1022 .

史金辉，王政平 . 消偏振分光棱镜的设计与性能分析［J］. 哈尔滨工程大学学报， 2008 ，（ 9 ）： 1019 - 1022 . DOI: 10.3969/j.issn.1006-7043.2008.09.023 http://dx.doi.org/10.3969/j.issn.1006-7043.2008.09.023

WANG Guochao ， HUANG Guangyao ， ZHU Lingxiao ， et al . Fabrication and performance evaluation of nonpolarizing beam splitter with high splitting ratio in 780 nm band ［J］. Optics and Precision Engineering ， 2023 ， 31 （ 21 ）： 3088 - 3095 .

王国超，黄光耀，朱凌晓，等 . 780 nm波段高分光比消偏振分光片的制备及测试［J］. 光学精密工程， 2023 ， 31 （ 21 ）： 3088 - 3095 . DOI: 10.37188/ope.20233121.3088 http://dx.doi.org/10.37188/ope.20233121.3088

JASEM N A . New stacks design of polarized and non-polarized beam splitters ［J］. Journal of Optics ， 2024 ： 1 - 4 .

AL-HAMDANI A H ， RASHID H G ， HASHIM H T ， et al . Design and evaluation of immersed wideband non-polarizing beam splitter using ZEMAX pro-gram and needle/tunneling method ［J］. International Journal of Engineering Science ， 2016 ， 7 （ 8 ）： 879 - 884 .

BELOSLUDTSEV A ， VALAVIČIUS A ， KYŽAS N ， et al . Metal-dielectric broad-angle non-polarizing beam splitters with ultrathin copper layer ［J］. Optics & Laser Technology ， 2018 ， 107 ： 297 - 301 .

KIIRE T ， NAKADATE S ， SHIBUYA M . Simultaneous formation of four fringes by using a polarization quadrature phase-shifting interferometer with wave plates and a diffraction grating ［J］. Applied Optics ， 2008 ， 47 （ 26 ）： 4787 - 4792 .

GUO Jihua ， ZHANG Yan ， SHEN Shuai . Compensation of nonlinearity in a new optical heterodyne interferometer with doubled measurement resolution ［J］. Optics Communications ， 2000 ， 184 （ 1-4 ）： 49 - 55 .

GUO Rongli ， YAO Baoli ， GAOPeng ， et al . Parallel on-axis phase-shifting holographic phase microscopy based on reflective point-diffraction interferometer with long-term stability ［J］. Applied Optics ， 2013 ， 52 （ 15 ）： 3484 - 3489 .

LI Mingyu ， GU Peifu . Design of near ultraviolet band and wide-angle non-polarization beam-splitting plate ［J］. Acta Photonica Sinica ， 2003 ， 32 （ 10 ）： 1231 - 1233 .

李明宇，顾培夫 . 近紫外区宽角度消偏振平板分光镜［J］. 光子学报， 2003 ， 32 （ 10 ）： 1231 - 1233 .

XU Xiaofeng ， XING Huaizhong ， DU Xiliang ， et al . Study of anti-polarization and antireflection coatings of broad angle ranges by inhomogeneous coatings ［J］. Acta Photonica Sinica ， 2007 ， 36 （ 9 ）： 1691 - 1693 .

徐晓峰，邢怀中，杜西亮，等 . 利用非规整膜系实现宽角度入射减偏振、减反射薄膜的研究［J］. 光子学报， 2007 ， 36 （ 9 ）： 1691 - 1693 .

YU Kan ， LIU Wen ， HUANG Dexiu . Characteristics analysis and stack design of angle-tuned filter ［J］. Acta Photonica Sinica ， 2008 ， 37 （ 6 ）： 1175 - 1179 .

俞侃，刘文，黄德修 . 角度调谐滤光片特性分析及膜系设计［J］. 光子学报， 2008 ， 37 （ 6 ）： 1175 - 1179 .

NIE Mingju ， LIU Deming . Optimized algorithm of polarization controlling for thin-film filters at oblique incidence ［J］. Acta Photonica Sinica ， 2009 ， 38 （ 8 ）： 2015 - 2018 .

聂明局，刘德明 . 倾斜入射薄膜滤光片偏振控制的优化算法［J］. 光子学报， 2009 ， 38 （ 8 ）： 2015 - 2018 .

LIAN Songyou ， YU Yunpeng ， LIN Shunhui ， et al . The design and calculation of optical anti-reflected and reflected multilayer film ［J］. Material Sciences ， 2016 ， 7 ： 78 .

连松友，余云鹏，林舜辉，等 . 光学增透和增反多层膜的设计与计算［J］. 材料科学， 2016 ， 7 ： 78 .

LUO Jing ， HE Xu ， FAN Kuo ， et al . Polarization aberrations in an unobscured off-axis astronomical telescope and their effects on optics ellipticity ［J］. Acta Optica Sinica ， 2020 ， 40 （ 8 ）： 0811001 .

罗敬，何煦，范阔，等 . 无遮拦离轴天文望远镜偏振像差分析及其对光学椭率的影响［J］. 光学学报， 2020 ， 40 （ 8 ）： 0811001 . DOI: 10.1117/12.2579850 http://dx.doi.org/10.1117/12.2579850

苏州欣恒高科光电科技有限公司 . 一种消偏振分光棱镜：中国， 202022245443.0 ［P］. 2021-04-02 .

ME-L 穆勒矩阵光谱椭偏仪［EB/OL］. http：//www.eoptics.com.cn/gptpy/4551.jhtml http://www.eoptics.com.cn/gptpy/4551.jhtml

CHIPMAN R ， LAM W S T ， YOUNG G . Polarized light and optical systems ［M］. CRC Press ， 2018 .

LU S Y ， CHIPMAN R A . Interpretation of Mueller matrices based on polar decomposition ［J］. Journal of the Optical Society of America A ， 1996 ， 13 （ 5 ）： 1106 - 1113 .

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