1.中国科学技术大学 纳米技术与纳米仿生学院,合肥 230026
2.中国科学院 苏州纳米技术与纳米仿生研究所 纳米器件与应用重点实验室,苏州 215123
黄灵意(2002—),女,硕士,主要研究方向为微机电系统。Email: lingyihuang2024@sinano.ac.cn
沈文江(1973—),男,研究员,博士,主要研究方向为微机电系统。Email: wjshen2011@sinano.ac.cn
收稿:2026-01-12,
修回:2026-04-03,
录用:2026-04-17,
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黄灵意,周鹏,李浩祥,等. 基于加强筋调控的新型低串扰二维电磁微镜[J].光子学报,2026,55(7):0723001
HUANG Lingyi, ZHOU Peng, LI Haoxiang, et al. A Novel Low‑crosstalk 2D Electromagnetic Micromirror Enabled by Stiffener Control.[J]. Acta Photonica Sinica, 2026, 55(7):0723001
黄灵意,周鹏,李浩祥,等. 基于加强筋调控的新型低串扰二维电磁微镜[J].光子学报,2026,55(7):0723001 DOI: 10.3788/gzxb20265507.0723001. CSTR: 32255.14.gzxb20265507.0723001.
HUANG Lingyi, ZHOU Peng, LI Haoxiang, et al. A Novel Low‑crosstalk 2D Electromagnetic Micromirror Enabled by Stiffener Control.[J]. Acta Photonica Sinica, 2026, 55(7):0723001 DOI: 10.3788/gzxb20265507.0723001. CSTR: 32255.14.gzxb20265507.0723001.
针对传统MEMS微镜在激光雷达应用中存在的双轴串扰问题,本文提出并实现了一种低串扰的电磁驱动MEMS二维扫描微镜结构。该结构主要从两方面降低双轴串扰:一是通过分离电磁线圈并优化磁场方向,实现双轴运动的独立驱动。将慢轴驱动线圈置于万向节上,利用水平方向磁场驱动;快轴驱动线圈则布置在快轴两侧,由垂直方向磁场驱动。二是通过优化微镜背面结构,提升快轴驱动力矩的传动效率,从而在达到相同快轴转角时降低所需驱动电流,减少因快轴线圈不平衡力矩引起的串扰。测试结果表明,所设计并制备的微镜,在快轴光学转角为30°时,串扰仅为0.142%,相当于商业化传统单线圈二维电磁微镜串扰的1/21。结果验证了所提出的结构在低串扰二维扫描方面的优越性能,在提升激光雷达系统的探测能力方面具有凸显优势。
Conventional single coil two dimensional electromagnetic micromirror used in Light Detection and Ranging (LiDAR) applications suffer from inter axis crosstalk. This crosstalk originates from the single coil topology operating in an approximately 45° oblique magnetic field, which inherently generates torque components about both rotational axes; as a result, driving the fast axis alone produces an uncontrolled slow axis deflection. The crosstalk effect becomes more pronounced for mirrors with larger apertures. Motivated by this mechanism and informed by relevant literature, this work presents a novel two dimensional electromagnetic micromirror that preserves a large mirror aperture while effectively reducing inter axis crosstalk.This work proposes a dual axis independently driven micromirror architecture that prevents generation of slow axis torque when the fast axis is driven. This is achieved by spatially separating the electromagnetic coils and optimizing the local magnetic field orientations: the slow driving coil is mounted on a gimbal and driven by a predominantly horizontal magnetic field for quasi static scanning, while the fast driving coils are symmetrically placed on both sides of the fast axis and driven by a predominantly vertical magnetic field for resonant scanning. Both axes are driven by independent current sources. However, due to manufacturing and assembly tolerances, the electromagnetic forces produced by the symmetrically placed fast axis coils become asymmetric, resulting in a residual net torque about the slow axis. To address this, this work reduced the effective stiffness of the gimbal and optimized the mirror’s backside geometry to improve the transmission efficiency of the fast axis driving torque; this lowers the required drive current for a given fast axis rotation and further reduces crosstalk caused by unbalanced coil torques. Two device variants were implemented for comparison: Model 1 micromirror with optimized stiffeners and Model 2 micromirror without stiffener optimization. And the effectiveness of the stiffener optimization was validated by simplified theoretical derivations and finite element simulations for both models.In conclusion, the results demonstrate, to achieve a resonant optical rotation of 15°, Model 2 micromirror requires a drive current of 138.6 mA, whereas Model 1 micromirror requires only 26.2 mA. With both devices having the same quality factor, Model 1 demonstrates superior electromechanical energy conversion efficiency, consistent with the trends predicted by theoretical derivations and simulation analyses. By comparing the micromirrors designed in this work with a commercially available conventional single coil two dimensional electromagnetic micromirror, analysis of the crosstalk test results shows that at a fast axis optical rotation of 15°, the crosstalk of Model 2 micromirror is approximately one‑half that of the single coil micromirror, while the crosstalk of Model 1 micromirror is roughly one‑eighth of Model 2 micromirror. The coil separated topology therefore already yields lower crosstalk than conventional single coil devices on the market, and the stiffener optimization further reduces crosstalk. At a fast axis optical rotation of 30°, the crosstalk of Model 1 micromirror is only about one‑twenty‑first that of the single coil micromirror. Model 1 micromirror thus demonstrates both good scanning performance and very low inter axis crosstalk.The proposed micromirror architecture, combining independent dual axis actuation with backside stiffener optimization, effectively suppresses inter axis crosstalk while supporting large mirror apertures and large angle fast axis scanning, making it suitable for high resolution, high reliability LiDAR and precision optical scanning systems. However, asymmetry in the electromagnetic forces of the fast axis coils still exists, so crosstalk has not been completely eliminated. Future work will pursue systematic improvements to address the residual crosstalk, including mechanical measures such as reducing the number of fast axis coils while increasing turns per coil to lower sensitivity to geometric errors, and circuit level strategies such as independent current control and precise current compensation for symmetric coil pairs, with the goal of further eliminating residual crosstalk and improving scanning accuracy and consistency.
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